SVD-based MEMS Dynamic Testing Technology

To obtain the MEMS micro structure's high resolution measurement dynamic parameters, this paper, by obtaining stroboscopic imaging technology of micro structure of moving image sequence, proposed one kind based on the phase correlation technique and singular value decomposition technique combining sub-pixel measurement method. By the method of phase correlation, image space coordinate can transform into the frequency domain to the coordinates of the parameter space. And then through the singular value decomposition technique to obtain the correlation matrix, using the least-squares fitting, get the sub-pixel level displacement measurement results. The experimental results show that, with this method of measuring MEMS micro structure plane motion amplitude can reach sub-pixel accuracy, and can be effectively reduced by uneven illumination effect on the measuring result, thereby increasing the measurement results of stability and reduces the measuring error.